Skip Header
About Shibaura Mechatronics Investor Relations Products Social and Environmental
Activities
About Shibaura MechatronicsInvestor RelationsProducts Social and Environmental
Activities About Shibaura Mechatronics Investor RelationsProducts Social and Environmental
Activities
About Shibaura MechatronicsInvestor Relations Products Social and Environmental
Activities
Home > Products > Vacuum Equipment > OLED Vacuum Bonding Equipment
Applies sealant on a substrate in a nitrogen atmosphere, performs drop filling of chemicals or sticks desiccating agent, aligns opposed substrates and bonds them
- High precision vacuum bonding
Utilizes our know-how in LCD panel manufacturing equipment; the state-of-the-art in vacuum technology - Supports various processes
Wide range of use, from R&D to production. Various options allow specifications to be configured to best fit the customer's process
| Substrate dimensions | Max. 370mm×470mm |
|---|---|
| Oxygen content, moisture content | 1ppm or less (for both) |
| Accuracy of alignment | ±2µm |
