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SHIBAURA
Japanese
SHIBAURA MECHATRONICS CORPORATION
Home > Products > Vacuum Equipment > Vacuum bonding equipment

Vacuum bonding equipment

Vacuum bonding equipment

Designed for glass substrates, wafers, OLED panels, LCD panels, optical pick-up lens, LPF for digital cameras, etc.
Bubble-free bonding of glass substrates by uniform spin coating of adhesives and bonding in vacuum chamber

Features

  • Bubble-free vacuum bonding
  • Continuous bonding of up to five sets of substrates
  • Switch between double- and single-sided adhesive application
  • Supports various substrate shapes (refer to specifications)
  • Various conditions can be set to assure uniform film thickness after bonding
Substrate thickness to be bonded MAX.10mm
Substrate
to be handled
Thickness 0.2mm to 2.0mm
Size Circular: Φ28mm to Φ100mm
Rectangular:□22mm to □100mm
Bonding capacity 10 sec./substrates set
Equipment Dimensions 1560W×800D×1200H












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