
Sputtering and plasma polymerization for plastic parts with one piece of equipment
| Equipment type | Placoat | CFS-36PV-100 |
|---|---|---|
| External dimensions (mm) |
W2500×D2500×H1500 | Φ900×H1750 (Chamber size) |
| Work installation part size (mm) |
max. L500×W500×H200 | max. Φ650×H1200 |
| Cycle time (sec) | 30 (except loading/unloading) | 300 (except loading/unloading) |
| Unit configuration | 1. L/L 2. Preliminary exhaust/Ahead disposal 3. Sputtering 4. Polymerization 5. Inline type |
Batch type 1. Sputtering 2. Polymerization |