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About Shibaura MechatronicsInvestor RelationsProducts Social and Environmental
Activities About Shibaura Mechatronics Investor RelationsProducts Social and Environmental
Activities
About Shibaura MechatronicsInvestor Relations Products Social and Environmental
Activities
Home > Products > Vacuum Equipment > Large
Batch Type Vacuum Evaporation Equipment
Measures to counter electro-magnetic interference (EMI) are indispensable for high-speed processing of recent electronic equipment. One solution is to apply thick metallic film evaporated onto the plastic enclosures of the electronic equipment. Our large batch type vacuum evaporation equipment for EMI shielding draws on our technology for mass production type vacuum evaporation equipment.
- Capable of forming a thick film, 2 to 3mm thick, in one evaporation.
- Capable of EMI shield forming with Cu+Ni film as well as Al film.
- Quick filament replacement with one-touch filament clamp
- Metal film with strong adhesion can be formed as special plasma processing equipped as standard reduces total cost of the evaporation working process.
| Type | CU-36PV-160E |
|---|---|
| Vacuum chamber | Φ1600, 2040H (total height) |
| Diffusion pump | 36-in (1 DP) |
| Evaporating electrodes | 3 pairs |
| Max. film thickness | 3µm |
| Jig carriage | Commonly used for 6-axis/8-axis equipment |
| Power requirement | 85kVA |
| Cooling water flow rate | 60L/min |
| Plasma process | Standard function |
| Production ability (Processing volume) |
Mobile phone case (60×160×20mm) 6-axis 552 pcs 8-axis 736 pcs |
