
Reform surface of plastics with thin air ionized by microwave energy.
The surface is reformed by high-density low temperature plasma without being affected by the microwave, improving hydrophilicity and adhesiveness.
A wide-ranging product lineup covers a small chamber type for laboratory use to large equipment with a 2m diameter for plasma processing.
| Microwave output | 1.5kW×1 (2M164×1) |
|---|---|
| Oscillation frequency | 2450±30MHz |
| Plasma generating system | 1 system |
| Exhaust pump | 3000L/min |
| Throughput | 40 to 670Pa (0. 3 to 5Torr) |
| Chamber dimensions | Φ600×Length 800mm |