
Laser removes short-circuit patterns on a substrate to prevent destruction from static in the LCS substrate manufacturing process. Achieves dry and clean removal, unlike the icing and taping method. Fully-automatic type combines with a 4-cassette loader/unloader. A semi-automatic type with manual loading of substrates can also be provided.
| Item | Remarks | |||
|---|---|---|---|---|
| Laser | LD excited YAG laser | |||
| Laser output | 6W | |||
| Optical system | f=100mm | Z=20mm | ||
| Working point monitoring | ||||
| Power monitor | Oscillator/working point | |||
| Carrier system | Automatic/ 4 cassettes |
Manual | 4 cassettes | |
| Panel | Max. 27-inches | Max. 20-inches | ||
| Gauging | Automatic | Semi-automatic | ||
| XY stage | 730 × 650mm | 550 × 640mm | ||
| Alignment | 1 Camera → 2-mark reading | XYθ-alignment | ||
| Ionizer | AC ionizer | |||
| Control | PCL+Touch panel | |||