
Laser removes short-circuit patterns on a substrate to prevent destruction from static in the LCS substrate manufacturing process. Achieves dry and clean removal, unlike the icing and taping method. Fully-automatic type combines with a 4-cassette loader/unloader. A semi-automatic type with manual loading of substrates can also be provided.
| Item | Remarks | ||
|---|---|---|---|
| Laser | LD excited YAG laser | ||
| Laser output | 6W | ||
| Optical system | f=100mm | Z=20mm | |
| Working point monitoring | |||
| Power monitor | Oscillator/working point | ||
| Carrier system | Automatic | 4 cassettes | |
| Panel | Max. 27-inches | ||
| Gauging | Automatic | ||
| XY stage | 730 × 650mm | ||
| Alignment | 1 Camera → 2-mark reading | XYθ-alignment | |
| Ionizer | AC ionizer | ||
| Control | PCL+Touch panel | ||