Draws characters and marks on an entire wafer at high speed with high accuracy.

- LDP-SHG-YAG
LDP laser is maintenance free for one year
Green laser does no damage to devices
- High speed marking
6 minutes per wafer
(6-inch 1000 chips/wafer, 15 characters/chip)
- High positioning accuracy
Achieves total marking accuracy of ±50µm by combining picture processing and precision table.
- Easy preparation and editing of data
Easy new job set-up and editing by marking mapping software
- Mark and character inspection function
Supports character inspection and positional shift by picture processing after marking (optional)
| Item |
|
Remark |
| Laser |
SHG YAG laser |
|
| Laser output |
2w/5w |
|
| Wafer size |
6-inch, 8-inch |
4-inch, 5-inch (option) |
| Marking position accuracy |
±50µm |
|
| Options |
ID reader character
inspection |
|