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SHIBAURA MECHATRONICS CORPORATION
Home > Products > Laser Equipment > Laser Marker for Wafer Level CSP

Laser Marker for Wafer Level CSP

Laser Marker for Wafer Level CSP

Draws characters and marks on an entire wafer at high speed with high accuracy.

Features

  • LDP-SHG-YAG
    LDP laser is maintenance free for one year
    Green laser does no damage to devices
  • High speed marking
    6 minutes per wafer
    (6-inch 1000 chips/wafer, 15 characters/chip)
  • High positioning accuracy
    Achieves total marking accuracy of ±50µm by combining picture processing and precision table.
  • Easy preparation and editing of data
    Easy new job set-up and editing by marking mapping software
  • Mark and character inspection function
    Supports character inspection and positional shift by picture processing after marking (optional)
Item   Remark
Laser SHG YAG laser  
Laser output 2w/5w  
Wafer size 6-inch, 8-inch 4-inch, 5-inch (option)
Marking position accuracy ±50µm  
Options ID reader character
inspection
 

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