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SHIBAURA MECHATRONICS CORPORATION
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Wafer Marker

Wafer Marker

Wafer marker to print control numbers on silicon wafers.
Clean micro-marking minimizes dust generation in the semiconductor process.

Features

  • High speed, clean marking
  • Compact design
  • Easy maintenance (totally air cooled LD pumped)
  • Applicable to 3” to 300mm wafer (applicable to FOUP)
Item   Remark
Oscillation wavelength 1.06µm/0.53µm LD pumped
Laser output 6W/1.6W  
Marking accuracy ±0.1 to 0.25mm  
Throughput 180-240WPH Wafer/h

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